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Kayıt: Jan 17, 2022
Mesajlar: 85
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Tarih: 13 Haziran 2022, Pazartesi 16:39:08 Mesaj Konusu: The fluoride wars rage on - Nature |
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2–eight earlier than the stop of the decade, harold winters, along with his colleague john coburn at ibm posted perhaps one of the most cited paper in plasma processing, showing that a synergistic interplay between high-quality ions (ar+) and reactive neutrals (xef2) impinging simultaneously on si produced an etching price that became extra than the sum of the sputtering fee by ar+ and the slow isotropic, chemical etching by using xef2 within the absence of ion bombardment.
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